Patents

Methods for Multiple-Patterning Nanosphere Lithography for Fabrication of Periodic Three-Dimensional Hierarchical Nanostructures, X. Xu, Q. Yang, N. Wattanatorn, C. Zhao, L. A. Stewart, S. J. Jonas, and P. S. Weiss, U.S. Patent 11,037,794 (2021) Methods for Multiple-Patterning Nanosphere Lithography for Fabrication of Periodic Three-Dimensional Hierarchical Nanostructures, X. Xu, Q. Yang, N. Wattanatorn, C. Zhao, L. […]